COSMO-GEKKO
 Vacuum Robot Series

- AWC/Self-dignosis 기능
‌‌- YASKAWA DD 모터 & 컨트롤러 채용
‌‌- 다양한  Type 의 Arm 채용/고객의 Needs에 맞게 Customizing 가능
- 고진공/고클린 사양 대응
‌‌- SEMI Standard 
COSMO-GEKKO-VDK31HDA 

- Wafer Size : 200/300mm
- Axis Qty : 4 (DD Motor)
- Controller : SRK200
- Feature : Dual
- Clean Class : Class 1

 
COSMO-GEKKO-VDK31HQF

- Wafer Size : 200/300mm
- Axis Qty : 4(DD Motor)
- Controller : SRK200
- Feature : Quad
- Clean Class : Class 1

 
COSMO-GEKKO-VDK31HDP

- Wafer Size : 200/300mm
- Axis Qty : 4(DD Motor)
- Controller : SRK200
- Feature :  Dual Parallel
- Clean Class : Class 1

 
COSMO-GEKKO-VDk31HDM

- Wafer Size : 200/300mm 
- Axis Qty : 4(DD Motor)
- Controller : SRK200
- Feature : Minimum Dual
- Clean Class : Class 1

 
 


COSMO-GEKKO-VTK 


- Wafer Size : 200/300mm
- Axis Qty : 5(DD Motor)
- Controller : SRK200
- Feature :  Linear
- Chamber Qty : up to 12 Chambers
- Clean Class : Class 1


(주) 볼타오토메이션
경기도 화성시 동탄순환대로 823, 에이팩시티 2F

우편번호 18471
Tel : 82-31-5182-9670 / Fax : 82-31-5182-9671
E-mail : admin@voltaautomation.co.kr  
‌                 sales@voltaautomation.co.kr (견적문의)